OZ-150
OZ-150 special type oxygen generator- Ozone production(g/hr)
- 150
- Regular ozone concentration (g/㎥)
- over 140
- Power consumption (kW)
- 3
- Power specification (V,Hz)
- 220, 60
- Weight of a product (kg)
- water cooling
- Size(W*D*H(mm))
- 900x600x1485
Applications
Semiconductor process
· Cooling method : water cooling
· Flow meter : 25LPM
· Control of ozone concentration : control of flow and volume of oxygen
· Display device : 1.power : LED display / 2.flow meter : control of flow of oxygen
· Control of ozone production : control of flow and volume of oxygen
· Inlet,Oulet Fitting : 1.GAS : 6mm / 2.Water : 10mm
· Main material of enclosure : SUS304
